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特价探针天线 THz 太赫兹近场成像探针（near field THz micropr)
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系统特点
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系统特点
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实现微米级空间分辨率(up to 3 μm)
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工作频率覆盖0-4THz
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可以配合现有THz光源使用( λ < 860 nm, 1-5 mW)
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应用领域
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应用领域
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Terahertz research: Metamaterials, plasmonics, graphene, waveguides
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High-resolution Terahertz near-field imaging
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Contact-free sheet resistance imaging of semiconductors
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MMIC device characterization
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Non-destructive chip inspection
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Time-domain reflectometry (TDR)
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技术指标
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技术指标
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Item
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MKR-HR
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MKR-HRS
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MKR-HS
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Max. spatial resolution
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3 μm
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20 μm
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100 μm
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Photoconductive gap size at tip
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1.5 μm
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2 μm
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3 μm
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Dark current @ 1V Bias
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< 0.5 nA
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< 0.5 nA
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< 0.4 nA
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Photocurrent
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> 1 μA
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> 0.6 μA
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> 0.6 μA
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Excitation wavelength
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700nm ... 860 nm
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Excitation wavelength
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700nm ... 860 nm
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Excitation power
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1mW ... 4 mW
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Connection type
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SMP
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系统应用实例
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采用近场测量方法测量激光掺杂多晶硅晶圆的电导率
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采用近场测量在二氧化硅上石墨烯的电导率不均匀性
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